CREST, Japan Science and Technology, Japan A, TohokuUniversity B
Yanwei Ma A, S. Awaji A, B, K.Watanabe A, B, and M. Motokawa A,B
It was demonstrated early that the magnetic field greatly favorsthe alignment of the c-axis of Y123. If the magnetic filed is applied for afilm fabricating process, the orientation of grains and other field effectsfor a film growth are expected. Based on this, a new metal-organic chemicalvapor deposition (MOCVD) apparatus with an 11T cryocooled superconductingmagnet was developed recently. CVD equipment is hot-wall type. The silverpolycrystalline substrates were used. It is found that the full width ofhalf maximum (FWHM) of x-ray rocking curves of (006) peaks for 6T films isapproximately 4 degree less than 5 degree for 0 films. Furthermore, themicrostructure of 6T films becomes denser comparing with films withoutfield. As a result, the superconducting properties are improved by anapplied magnetic field for MOCVD process.